An improved form of thermal actuator suitable for use in a MEMS device. The actuator includes a first material such as polytetrafluoroethylene having a high coefficient of thermal expansion and a serpentine heater material having a lower coefficient of thermal expansion in thermal contact with the first...http://www.google.de/patents/US6067797?utm_source=gb-gplus-sharePatent US6067797 - Thermal actuator
