A confocal laser scanning mode interferene contrast microscope comprises a laser source, an illuminating optical system for condensing a light beam from the laser source and forming a light spot on an object to be examined, a condensing optical system for condensing the light beam from the object to...http://www.google.de/patents/US5581345?utm_source=gb-gplus-sharePatent US5581345 - Confocal laser scanning mode interference contrast microscope, and method of measuring minute step height and apparatus with said microscope
