A method and apparatus for production of high-resolution laser-induced damage images by small etch points is based on generation of the initial electron density in the relatively large volume, creation of the breakdown at a small part of the said volume and control of the energy amount enclosed inside...http://www.google.de/patents/US6509548?utm_source=gb-gplus-sharePatent US6509548 - Method and laser system for production of high-resolution laser-induced damage images inside transparent materials by generating small etch points
