In a TFT array substrate 10 of an electrooptical device, a scanning line 3a, a drain electrode 11, a first light shield layer 13, and a data line 3a are laminated over a channel region 1a of a TFT 30 and a second light shield layer 14 is laminated beneath the channel region 1a. A side wall formation...http://www.google.de/patents/US20030210363?utm_source=gb-gplus-sharePatent US20030210363 - Electrooptical device, projection-type display apparatus, and method for manufacturing the electrooptical device
