A vacuum treatment facility and method are provided for the surface treatment of workpieces, particularly for the covering of the central and/or peripheral area of circular-disk-shaped workpieces, as in the manufacturing of CD's or storage plates. The facility comprises a chamber arrangement that can...http://www.google.de/patents/US5662785?utm_source=gb-gplus-sharePatent US5662785 - Method for masking a workpiece and a vacuum treatment facility
