The present invention presents an improved optical window deposition shield for optical access to a process space in a plasma processing system through a deposition shield, wherein the design and fabrication of the optical window deposition shield advantageously provides an optically clean access to...http://www.google.de/patents/US7811428?utm_source=gb-gplus-sharePatent US7811428 - Method and apparatus for an improved optical window deposition shield in a plasma processing system
