An exemplary embodiment relates to a phase shifting mask including a glass substrate layer and an amorphous carbon absorber layer located above the glass substrate layer. The amorphous carbon absorber layer includes apertures through which light passes unaltered to the glass substrate layer....http://www.google.de/patents/US6852455?utm_source=gb-gplus-sharePatent US6852455 - Amorphous carbon absorber/shifter film for attenuated phase shift mask
