A microelectromechanical systems stress sensor comprising a microelectromechanical systems silicon body. A recess is formed in the silicon body. A silicon element extends into the recess. The silicon element has limited freedom of movement within the recess. An electrical circuit in the silicon element...http://www.google.de/patents/US7311009?utm_source=gb-gplus-sharePatent US7311009 - Microelectromechanical systems contact stress sensor
