Workpieces are loaded into a cleaning chamber. The cleaning chamber is pressurized with a first dense-phase cleaning fluid, the temperature and pressure of the first dense-phase fluid being maintained at less than about 1500 psi using a temperature control device. The workpieces are soaked in the first...http://www.google.de/patents/US7361231?utm_source=gb-gplus-sharePatent US7361231 - System and method for mid-pressure dense phase gas and ultrasonic cleaning
