A monolithic crystalline structure and a method of making involves a semiconductor substrate, such as silicon, and a ferroelectric film, such as BaTiO.sub.3, overlying the surface of the substrate wherein the atomic layers of the ferroelectric film directly overlie the surface of the substrate. By controlling...http://www.google.de/patents/US6080235?utm_source=gb-gplus-sharePatent US6080235 - Geometric shape control of thin film ferroelectrics and resulting structures
