A method for coating free-standing micromechanical devices using spin-coating. A solution with high solids loading but low viscosity can penetrate the free areas of a micromachined structure. Spinning this solution off the wafer or die results in film formation over the devices without the expected damage...http://www.google.de/patents/US6753037?utm_source=gb-gplus-sharePatent US6753037 - Re-coating MEMS devices using dissolved resins
