A plasma processing reactor includes a helical resonator including a top plate and a helical coil, the helical coil is made of a metal with a length of .lambda./4, wherein n is an integer and .lambda. is a wavelength of rf frequency applied to the helical coil. The reactor also includes a plasma process...http://www.google.de/patents/US6225746?utm_source=gb-gplus-sharePatent US6225746 - Plasma processing system
