A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second...http://www.google.de/patents/US7548145?utm_source=gb-gplus-sharePatent US7548145 - Hysteretic MEMS thermal device and method of manufacture
