The Lateral-Moving Micromachined Thermal Bimorph provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication...http://www.google.de/patents/US7629664?utm_source=gb-gplus-sharePatent US7629664 - Lateral-moving micromachined thermal bimorph and method for fabricating same
