Outflow of heat generated by a linear motor to the outside is suppressed. A linear motor according to the present invention is a linear motor used in a vacuum atmosphere, including a stator, a movable element movable relative to the stator, and a metal film formed on the surface of at least one of the...http://www.google.de/patents/US7218020?utm_source=gb-gplus-sharePatent US7218020 - Linear motor, stage apparatus, exposure apparatus, and device manufacturing method
