The present invention relates to a containment chamber that is used for carrying out multiple processing steps such as depositing on, polishing, etching, modifying, rinsing, cleaning, and drying a surface on the workpiece. In one example of the present invention, the chamber is used to electro chemically...http://www.google.de/patents/US6884334?utm_source=gb-gplus-sharePatent US6884334 - Vertically configured chamber used for multiple processes
