A method of manufacturing a thin TFT over a flexible substrate is provided. In formation of a TFT on a surface of a substrate having heat resistance, a liquid repellent film is formed selectively on a surface of the substrate, and an organic film is formed thereover. An element such as a TFT is formed...http://www.google.de/patents/US8110442?utm_source=gb-gplus-sharePatent US8110442 - Method of manufacturing semiconductor device
