An electrostatic micromechanical device with continuously variable displacement, that includes: a movable member having a first electrode; an opposing surface having a second electrode; a channel separating the movable member from the opposing surface; a liquid situated in the channel, wherein the liquid...http://www.google.de/patents/US6919983?utm_source=gb-gplus-sharePatent US6919983 - Microelectromechanical device with continuously variable displacement
