A freely rotatable microelectromechanical mirror and mirror array. Each mirror is connected to a plate flexibly suspended from a plurality of actuators by a plurality of plate flexures. The actuators are flexibly suspended from a support structure by a plurality of actuator flexures. The support structure...http://www.google.de/patents/US6480320?utm_source=gb-gplus-sharePatent US6480320 - Microelectromechanical mirror and mirror array
