A pattern forming method using an improved charged particle beam process, and a charged particle beam processing system prevent effectively the corrosion of a workpiece by a reactive gas adsorbed by and adhering to the surface of the workpiece when the workpiece is taken out into the atmosphere after...http://www.google.de/patents/US6344115?utm_source=gb-gplus-sharePatent US6344115 - Pattern forming method using charged particle beam process and charged particle beam processing system
