A method of fabricating a spatial light modulator. The method includes providing a first substrate including a first bonding surface, forming a first layer coupled to the bonding surface, wherein the first layer is characterized by a first set of material parameters, and forming a second layer coupled...http://www.google.de/patents/US8066890?utm_source=gb-gplus-sharePatent US8066890 - Spatial light modulator with multi-layer landing structures
