A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise...http://www.google.de/patents/US5865417?utm_source=gb-gplus-sharePatent US5865417 - Integrated electrically operable normally closed valve
