A full metal probe and a method of making the metal probe for electrical atomic force microscopy. In one embodiment, the method comprises manufacturing the full metal probe using two lithography steps. The step of etching thin membranes is dropped or eliminated to substantially reduce the processing...http://www.google.de/patents/US20020047091?utm_source=gb-gplus-sharePatent US20020047091 - Probe tip and method of manufacturing tips and probes for detecting microcurrent or microforce
