Highly efficient and highly sensitive sensors of small size are provided in desired position, desired shape and size for a micro structure that causes elastic deformation at least a part thereof. Moreover, utilizing the sensors allows facilitating to assemble and adjust the components, miniaturizing...http://www.google.de/patents/US7520165?utm_source=gb-gplus-sharePatent US7520165 - Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure
