A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the...http://www.google.de/patents/US7085059?utm_source=gb-gplus-sharePatent US7085059 - Spatial light modulator with robust mirror substrate condition
