A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which includes a first and a second layer, a substrate layer, and a substrate, spaced from the membrane to form an air gap. The layers of the membrane are characterized...http://www.google.de/patents/US6519073?utm_source=gb-gplus-sharePatent US6519073 - Micromechanical modulator and methods for fabricating the same
