A cantilever microstructure includes a cantilever arm with a proximal end connected to a substrate and a freely movable distal end. The cantilever arm comprises first and second sections and includes a continuous layer which exhibits a first thermal co-efficient of expansion (TCE). In one embodiment,...http://www.google.de/patents/US5796152?utm_source=gb-gplus-sharePatent US5796152 - Cantilevered microstructure
