A process liquid supply mechanism for supplying a process liquid comprises a process liquid supply source for supplying a process liquid, a process liquid discharging nozzle for discharging the process liquid, a pipe connecting the process liquid supply source to the process liquid discharging nozzle,...http://www.google.de/patents/US6848625?utm_source=gb-gplus-sharePatent US6848625 - Process liquid supply mechanism and process liquid supply method
