A microelectromechanical device (MEMS) utilizing nanoparticles for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode assembly having a first surface; and a movable reflective electrode assembly with...http://www.google.de/patents/US7711239?utm_source=gb-gplus-sharePatent US7711239 - Microelectromechanical device and method utilizing nanoparticles
