A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates...http://www.google.de/patents/US8098416?utm_source=gb-gplus-sharePatent US8098416 - Analog interferometric modulator device with electrostatic actuation and release
