A biofunctionalized nanoelectromechanical device (BioNEMS) for sensing single-molecules in solution by measuring the variation in the mechanical displacement of the BioNEMS device during a binding event is provided. The biofunctionalized nanoelectromechanical device according to the invention generally...http://www.google.de/patents/US7407814?utm_source=gb-gplus-sharePatent US7407814 - Active NEMS arrays for biochemical analyses