A bi-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The bi-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits....http://www.google.de/patents/US7365408?utm_source=gb-gplus-sharePatent US7365408 - Structure for photolithographic applications using a multi-layer anti-reflection coating
