A method of manufacturing a semiconductor substrate (7) includes the processes of: forming an insulation film (2) on a surface of a semiconductor substrate main body (1); forming an ion shield member (3) having a predetermined shape on the insulation film; implanting an ion into the semiconductor substrate...http://www.google.de/patents/US6852653?utm_source=gb-gplus-sharePatent US6852653 - Method of manufacturing semiconductor substrate, semiconductor substrate, electro-optical apparatus and electronic equipment
