To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films (2, 3) are formed by sputtering on the both surfaces of a metal thin plate (1) which are opposing relation to each other along the thickness thereof, while the...http://www.google.de/patents/US20020149296?utm_source=gb-gplus-sharePatent US20020149296 - Thin-film piezoelectric bimorph element, mechanical detector and inkjet head using the same, and methods of manufacturing the same
