An air curtain system for forming an air curtain dividing two processing spaces and for spraying air on to a substrate to remove any impurities remaining on the substrate includes an air supplier, a main body having an air inlet passage for receiving air from the air supplier, an air flow space defined...http://www.google.de/patents/US6192547?utm_source=gb-gplus-sharePatent US6192547 - Air curtain system used in manufacturing thin film transistor liquid crystal display
