It is an object to provide an aligner for centering a wafer and adjusting an angle of a notch or the like of the wafer while gripping edges of the wafer capable of attaining a shortened takt time and miniaturization of the apparatus by employing a mechanism capable of infinite rotation without being...http://www.google.de/patents/US7789614?utm_source=gb-gplus-sharePatent US7789614 - Aligner
