Microscopic batteries, integratable or integrated with microelectromechanical systems or other microscopic circuits, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed, among which comprise closed system microscopic batteries for internal storage...http://www.google.de/patents/US7166384?utm_source=gb-gplus-sharePatent US7166384 - Microscopic batteries for MEMS systems
