A TFTs fabricating process practicable at a low temperature, which includes the steps of forming a multi-layer body on a substrate, the multi-layer body including a semiconductor layer, a gate insulating layer and a lower thin layer, patterning the multi-layer body into islands, thereby removing the...http://www.google.de/patents/US5120667?utm_source=gb-gplus-sharePatent US5120667 - Process for fabricating a thin film transistor
