A method for making a probe finger structure including the steps of providing a wafer or wafer portion having an upper layer, a lower layer and an insulating or etch stop layer located between the upper and lower layers. The method further includes the step of etching the lower layer to form a mounting...http://www.google.de/patents/US20040119485?utm_source=gb-gplus-sharePatent US20040119485 - Probe finger structure and method for making a probe finger structure
