A load lock is comprised of a housing defining a partial chamber therein opening to a first face, the load lock defining a given point on which the center of a substrate is supported. A swap out plate is secured to the load lock and covers the first face thereof. The swap out plate defines a partial...http://www.google.de/patents/US5997235?utm_source=gb-gplus-sharePatent US5997235 - Swap out plate and assembly
