A spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In ...http://www.google.de/patents/US5835256?utm_source=gb-gplus-sharePatent US5835256 - Reflective spatial light modulator with encapsulated micro-mechanical elements 
