A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the...http://www.google.de/patents/US5744718?utm_source=gb-gplus-sharePatent US5744718 - Sensor using a resistance element
