An electrostatic chuck 55 comprises an electrical connector 140 which is connected to the electrode 105 to conduct an electrical charge to the electrode 105. The electrical connector 140 comprises a refractory metal having a melting temperature of at least about 1500 C., such as for example, tungsten,...http://www.google.de/patents/US6462928?utm_source=gb-gplus-sharePatent US6462928 - Electrostatic chuck having improved electrical connector and method
