An inkjet printhead heater chip has a silicon substrate with a heater stack formed of a plurality of thin film layers thereon for ejecting an ink drop during use. The thin film layers include: a thermal barrier layer on the silicon substrate; a resistor layer on the thermal barrier layer; a doped diamond-like...http://www.google.de/patents/US6805431?utm_source=gb-gplus-sharePatent US6805431 - Heater chip with doped diamond-like carbon layer and overlying cavitation layer
