A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical...http://www.google.de/patents/US7446876?utm_source=gb-gplus-sharePatent US7446876 - Vacuum ultra-violet reflectometer with stray light correction
