An apparatus and method for processing microelectronic workpieces. The apparatus can include a housing at least partially enclosing a process environment, with a first processing chamber and a second processing chamber positioned within the housing. The first processing chamber can have a first electrically...http://www.google.de/patents/US6632334?utm_source=gb-gplus-sharePatent US6632334 - Distributed power supplies for microelectronic workpiece processing tools
