A standard CMOS process is used to fabricate optical, optoelectronic and electronic devices at the same time on a monolithic integrated circuit. A polysilicon strip loaded waveguide is used as an example to illustrate the invention. The waveguide has a two layer core made of a polysilicon strip on a...http://www.google.de/patents/US7136563?utm_source=gb-gplus-sharePatent US7136563 - CMOS process polysilicon strip loaded waveguides with a two layer core
