A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric...http://www.google.de/patents/US5552925?utm_source=gb-gplus-sharePatent US5552925 - Electro-micro-mechanical shutters on transparent substrates
