Compositions comprising a single-phase rare-earth dielectric disposed on a substrate. Embodiments of the present invention provide the basis for high-K gate dielectrics in conventional integrated circuits and high-K buried dielectrics as part of a semiconductor-on-insulator wafer structure....http://www.google.de/patents/US7655327?utm_source=gb-gplus-sharePatent US7655327 - Composition comprising rare-earth dielectric
