A structure (113b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode (110b) is formed on the upper electrode...http://www.google.de/patents/US20060057756?utm_source=gb-gplus-sharePatent US20060057756 - Surface shape recoginition sensor and method of producing the same
